住房和城乡建设部关于发布《薄膜晶体管液晶显示器工厂设计规范》工程建设标准英文版的公告

　　现批准《薄膜晶体管液晶显示器工厂设计规范》（GB51136-2015）英文版。工程建设标准英文版与中文版出现异议时，以中文版为准。

　　该项工程建设标准英文版由住房和城乡建设部组织中国计划出版社有限公司发行。

住房和城乡建设部　　　　　　　　　　
2023年1月5日　　　 　　　　　　　  

3 Basic requirements3.0.1 The design of the TFT-LCD plant shall use resources reasonably, protect the environment,prevent and reduce the pollution and harm of waste gas, waste water, waste chemical, waste residue,dust, noise, vibration and electromagnetic radiation generated in the production and constructionactivities to the environment.

3.0.2 The design of the TFT-LCD plant shall be in accordance withthefollowing requirements:

1 According to the characteristics of the production process, new technologies, new equipmentand new materials for energy conservation and environmentalprotection shall be adopted.

2 Shall meet the requirements of tools installation, commissioning and overhaul, safetyproduction, and maintenance management.

3 Measures shall be taken to meet the requirements of fire safety.

4 Energy saving measures shall be taken5 Shall meet the requirement of huge space and clean environment for the production of TFT-LCD.

3.0.3 The design capability of the TFT-LCD production line shall be in accordance with therequirements of economic scale, and the design shall reserve conditions for future productiondevelopment or process improvement according to the enterprise development plan.浏览住房城3·

9 Heating,ventilation, air conditioning and cleaning9.1 General requirements9.1.1 Classification and type of cleanroom(zone)shall be defined according to production environmentrequirements provided by production process.

9.1.2 Cleanroom (zone) airflow shall be determined according to the classification and productionprocess requirements.

9.1.3 Besides to meet the requirements of the current national standard GB 50472 Code for Design ofElectronic Industry Clean Room, the principle of separating the cleaning and air conditioning systemshall be in accordance with following requirements:

1 Cleanrooms with large differences in temperature and humidity shall be provided withseparated purification and air conditioning systems.

2 Cleanrooms with large different of allowable fluctuation range in temperature and humidityshall be provided with separated purification and air conditioning systems.

9.1.4 The fresh air volume for cleanroom shall be the bigger one of the following:

1 The sum of the amount of fresh air required to compensate for the exhaust air volume andmaintain the indoor positive pressure.

2 Fresh air volume to assure no less than 40m per person per hour working in cleanroom.

9.1.5 A certain static pressure difference shall be maintained between cleanroom and the surroundingspace. The static pressure difference shall be in accordance with the following requirements:

1 The statie pressure difference between cleanrooms of different class should be no less than 5Pa.

2 The static pressure difference between cleanroom and non-clean area shall not be less than 5Pa.3The statie pressure difference between cleanroom and outdoor shall not be less than 10Pa.

9.1.6 Vibration isolator shall be provided for ducts and water pipes installed in key production area ofArray,CF,and Cell building.

9.2 Heating, ventilation and waste gas treatment9.2.1 Anti-freezing and heating facilities shall be provided in utility building and pipe bridge located insevere cold and code region. The heating design of other rooms shall meet the requirements of thecurrent national standard GB 50019 Design Code for Heating Ventilation and Air Conditioning ofIndustrial Buildings.

9.2.2 Heating radiators shall not be installed in cleanroom(zone).

9.2.3 Local exhaust shall be provided for tools in cleanroom generating dusts or harmful gases. Andthe exhaust hood should be closed.

9.2.4 Design of the exhaust system shall be in accordance with the following requirements:

1 Local exhaust treatment shall be provided for plasma enhanced chemical vapor deposition(PECVD)and dry etching tools.

2 Separate exhaust system shall be designed for acid, alkali, toxic and organic exhaust. Backupfans and emergency power shall be provided.